Thin film bulk acoustic wave resonators: a technology overview
نویسنده
چکیده
This paper describes a high quality thin film piezoelectric aluminium nitride technology developed for applications in bulk acoustic wave resonators and filters. The fabrication of both SMR and FBAR resonators is described, and the main characteristics of these devices are reviewed.
منابع مشابه
Tunable coupled surface acoustic cavities
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تاریخ انتشار 2003